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Kawasaki Heavy eyes new plant for chipmaking robots

Kawasaki Heavy will boost output capacity for these robots used to move wafers within clean rooms at semiconductor fabrication facilities.

TOKYO -- Kawasaki Heavy Industries will construct a new domestic plant for robots used in semiconductor fabrication, expecting demand to grow with rising interest in the "internet of things."

The Japanese company will invest 10 billion yen ($99 million) in the facility, which will be built at the Nishi-Kobe works in Kobe and is slated to be in operation by the end of March 2018. The new plant will boast 26,000 sq. meters of floor space and make robots that transport wafers inside clean rooms.

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