ASML to quintuple advanced EUV chip tools staff in Japan

Expanded maintenance crew to keep Rapidus operations running smoothly

20250402N ASML

ASML maintenance staffers work on an extreme ultraviolet lithography system. (ASML)

TSUYOSHI TAMEHIRO

TOKYO -- ASML Holdings, the Dutch supplier of advanced chipmaking equipment, plans to quintuple its Japan-based maintenance staff for the machines in the next few years, Nikkei has learned.

ASML is the sole manufacturer of extreme ultraviolet (EUV) lithography equipment, essential for making leading-edge chips. In December, Rapidus became the first Japanese chipmaker to receive deliveries of the EUV machines.

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