TOKYO -- Canon said Thursday it is delivering the first unit of its next-generation lithography equipment to a U.S. group developing advanced semiconductors, introducing a new production technology that could cut costs as well as electricity usage.
The nanoimprint lithography machine is going to the Texas Institute for Electronics, a consortium supported by the University of Texas at Austin that includes Intel and other chip companies as well as public-sector and academic organizations. The equipment will be used by chipmakers for research and development.
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