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Japanese makers still lead world in photolithography technology

TOKYO -- Japanese makers have lost their luster in the semiconductor industry in recent years. But for semiconductor production equipment and materials, some Japanese manufacturers are still strong, particularly in the area of photolithography technology for making substrates.

     Major camera makers Nikon and Canon are renowned in the industry for their photolithography equipment, while Tokyo Electron has strengths as a semiconductor coater and developer. Other Japanese makers take the lead in light-sensitive material called resist, photomask and light-source technologies.

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