Canon ships first next-gen chipmaking equipment to U.S. consortium

New tech using molds instead of light exposure seen saving energy and money

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Canon is sending its first nanoimprint lithography unit to the Texas Institute for Electronics, a public-private U.S. consortium. (Photo by Kohei Yamada) 

KOHEI YAMADA, Nikkei staff writer

TOKYO -- Canon said Thursday it is delivering the first unit of its next-generation lithography equipment to a U.S. group developing advanced semiconductors, introducing a new production technology that could cut costs as well as electricity usage.

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