TOKYO -- Japanese chipmaking equipment manufacturer Tokyo Electron opened a massive research and development facility Wednesday, looking to deepen collaboration with TSMC and other clients as they develop next-generation 1-nanometer semiconductors.
Equipment maker's Kumamoto facility to collaborate with nearby TSMC, others

The four-story R&D has a floor area of about 27,000 square meters. It is scheduled to begin operations next spring. (Photo by Kosuke Kondo)
TOKYO -- Japanese chipmaking equipment manufacturer Tokyo Electron opened a massive research and development facility Wednesday, looking to deepen collaboration with TSMC and other clients as they develop next-generation 1-nanometer semiconductors.