SemiconductorsTokyo Electron investments help Japan's Silicon Road reclaim glory
Chipmaking equipment producer looks 'four generations ahead' in bolstering supply chain
A Tokyo Electron subsidiary in Miyagi prefecture develops and produces plasma etching equipment, which is crucial to front-end chip manufacturing. (Tokyo Electron)
TAKUYA MATSUDA, Nikkei staff writer
SENDAI, Japan -- Japanese chipmaking equipment manufacturer Tokyo Electron is making big capital investments in Japan's northeast, a region once known as the "Silicon Road," as the company works to hone mass-production technology several generations away.