TOKYO -- Japanese chipmaking equipment maker Tokyo Electron is going after U.S.-based rival Lam Research with a groundbreaking new technology in 3D NAND flash memory channel etching that could ultimately net the company billions of dollars.
Breakthrough could flip market shares of the chipmaking equipment producers

Tokyo Electron's development team in Miyagi prefecture, Japan, made a breakthrough that the company believes could greatly improve its bottom line. (Tokyo Electron)
TOKYO -- Japanese chipmaking equipment maker Tokyo Electron is going after U.S.-based rival Lam Research with a groundbreaking new technology in 3D NAND flash memory channel etching that could ultimately net the company billions of dollars.